16 Master's degrees in Nanoscience and Nanotechnology in Germany
Germany offers a wide range of Nanoscience and Nanotechnology programmes tailored to international students. Tuition fees can vary, with the lower-end being around €746 and the typical fee at €1,500. On the higher end, fees can reach up to €6,000. A notable 57% of programmes are considered affordable, making it accessible for many students. Additionally, 6% of these programmes are available online, offering flexibility for those who prefer remote learning. Germany is home to a significant number of universities specialising in this field, with 5% of institutions offering Nanoscience and Nanotechnology programmes. This diverse range ensures that students can find a programme that suits their academic and career goals.

Quantum Science and Technology Friedrich Schiller University Jena
4,2(21)Jena, Germany Top 6% in WorldwideThe M.Sc. Quantum Science and Technology is an all-English, two-year Master's degree course at Friedrich Schiller University Jena providing multidisciplinary coverage in the field of quantum sciences, including quantum mechanics, information, communication, computing, imaging, sensing and other growing fields of quantum technology.

Photonics Friedrich Schiller University Jena
4,2(21)Jena, Germany Top 6% in WorldwideThe Master of Science in Photonics is an all-English, two-year Master's degree course providing multidisciplinary coverage in the field of optics and photonics.
Micro- and Nanoelectronics The Brandenburg University of Technology Cottbus - Senftenberg
3,6(18)Cottbus, GermanyThe Micro- and Nanoelectronics program at The Brandenburg University of Technology Cottbus - Senftenberg is aimed at physicists and electrical engineers who are aiming for a career in the semiconductor industry and research. In your bachelor's degree, you have already dealt with solid-state physics and/or electronics.
Nanoelectronic Systems TU Dresden
4,1(21)Dresden, Germany Top 3% in WorldwideThis MSc Nanoelectronic Systems from TU Dresden focuses on three keY areas: technologies for nanoelectronic systems, design of nanoelectronic systems and applications of nanoelectronic systems.
Micro and Nanotechnologies Ilmenau University of Technology
4,0(20)Ilmenau, GermanyThe Micro and Nanotechnologies degree from Ilmenau University of Technology teaches which technologies and processes are required for this in combination with materials.
Nano-Science University of Tübingen
4,0(20)Tübingen, Germany Top 3% in WorldwideNano-Science from University of Tübingen aims to reach prospective students with a broad interest in different natural sciences. Within the four study semesters, the program provides solid theoretical as well as practical basic knowledge in the subjects of biology, chemistry, and physics.
Nanoscience and Nanotechnology University of Siegen
4,3(64)Siegen, Germany Top 15% in WorldwideThe master program of Nanoscience and Nanotechnology at University of Siegen is a two-year 120 ECTS English language degree program offered to national and international students. It focuses on modern aspects of the science and technology of nanoscopic systems, ranging from basic knowledge to applications and devices.
Nanotechnology Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
4,1(45)Erlangen, Germany Top 3% in WorldwideThe Nanotechnology at Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU) is to deepen the students’ knowledge specifically in selected areas.
Nanoscience University of Kassel
3,7(19)Kassel, Germany Top 20% in WorldwideThe University of Kassel's Nanoscience master's degree is a perfect course for students, who have an eye for minute details and wish to examine things very closely.
Photon Science and Technology Max Planck School of Photonics
Jena, Germany +2The joint master’s degree in Photon Science and Technology (MPST Study program) together with Friedrich-Schiller-University Jena, Friedrich-Alexander-University Erlangen (FAU) and Karlsruhe Institute of Technology (KIT) from Max Planck School of Photonics is an all-English, two-year Master’s degree course in the field of optics and photonics.
European Joint Master Degree on Embedded Intelligence Nanosystems Engineering (EMINENT) University of Siegen
4,3(64)Siegen, Germany +4 Top 15% in WorldwideThe programme offers advanced training from the nanoscale fabrication of devices and materials, including advanced sensoric and machine-learning components, up to macroscale intelligent systems and IoT interconnected devices in the information, sensing, and energy application areas.
Micro and Nano Systems Chemnitz University of Technology
3,9(23)Chemnitz, GermanyThe Micro and Nano Systems programme offered at Chemnitz University of Technology provides world-class, future-oriented education in design, manufacturing, characterization and integration of miniaturized components into engineering systems.
Nanoscience University of Konstanz
4,7(180)Konstanz, Germany Top 6% in WorldwideThe Nanoscience study programme from University of Konstanz provides you with an understanding of how to manipulate nanostructures and material structures and how to specifically develop new functionalities and areas of application through their interaction with the macroscopic world.
Materials Science Powered by Large Scale Facilities University of Rennes
4,0(26)München, Germany +3 Top 8% in WorldwideMaterials Science Powered by Large Scale Facilities is a two-year international Master course in Materials Science fully taught in English at Université de Rennes 1, delivering multiple Master degree, and recognized as European formation of excellence in this field.
Advanced Semiconductor Nanotechnologies Otto von Guericke University Magdeburg
4,4(61)Magdeburg, Germany Top 20% in WorldwideStudents in Advanced Semiconductor Nanotechnologies at Otto von Guericke University Magdeburg acquire advanced scientific skills and hands-on experience in chemical and physical technologies for the fabrication of miniaturized semiconductor devices.
Micro- and Nanotechnology Munich University of Applied Sciences
4,3(66)München, GermanyIf you strive to qualify yourself for your career in a highly future-oriented field, and you seek for a scientific work with innovative technology – in this case the Master study program Micro- and Nanotechnology offered by the Munich University of Applied Sciences is the perfect choice.