M.Sc. On Campus

Micro and Nano Systems

Chemnitz University of Technology

24 months
Tuition fee
Apply date
Start date


The Micro and Nano Systems programme at Chemnitz University of Technology provides world-class, future-oriented education in design, manufacturing, characterization and integration of miniaturized components into engineering systems. 


The interdisciplinary courses in Micro and Nano Systems at Chemnitz University of Technology cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative products, in business administration and management. Classes and practical training address current and prospective needs of industrial and academic research.


The possibilities for graduates are widespread, because of the high potential for innovation in nano and micro systems. The teaching language, English, offers degree holders excellent chances to become global actors.

Programme Structure

Courses included:

  • Microsystems design
  • Design of Heterogeneous Systems
  • Semiconductor physics / Nanostructures
  • Micro and nano devices
  • Smart Sensor Systems
  • Reliability of micro and nano systems
  • Technologies for micro and nano systems

Key information


  • Full-time
    • 24 months

Start dates & application deadlines


120 ECTS


On Campus

Academic requirements

We are not aware of any academic requirements for this programme.

Other requirements

General requirements

  • Vocationally-qualifying university bachelor’s degree in Electrical Engineering, Information & Communication Technology or equivalent degree program with regard to content, English language proficiency at Level B2 and German language proficiency at level A2 according to the CEFR

Tuition Fee

To alway see correct tuition fees
  • International

    Tuition Fee
    Based on the tuition of 0 EUR per year during 24 months.
  • EU/EEA

    Tuition Fee
    Based on the tuition of 0 EUR per year during 24 months.

Living costs for Chemnitz

730 - 1100 EUR /month
Living costs

The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.


Studyportals Tip: Students can search online for independent or external scholarships that can help fund their studies. Check the scholarships to see whether you are eligible to apply. Many scholarships are either merit-based or needs-based.

Due for update

Updated over a year ago

Check the official programme website for potential updates.

Our partners

Micro and Nano Systems
Chemnitz University of Technology


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