M.Sc. On Campus

Micro and Nanotechnologies

Ilmenau University of Technology

24 months
Tuition fee
Apply date
Start date


The master program Micro and Nanotechnologies from Ilmenau University of Technology is designed non-consecutive. It is operated as a cooperation by the Department of Electrical Engineering and Information Technology, the Department of Mechanical Engineering and the Department of Mathematics and Natural Sciences. Students can acquire a Master’s degree in Micro- and Nanotechnologies. 

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The Micro and Nanotechnologies program from Ilmenau University of Technology is directed to students with a bachelor degree or to those who want to change over from a diploma program (needs to be individually checked) from the following courses: Physics, Technical Physics, Electrical Engineering and Information Technology, Chemistry/Materials Sciences and Engineering, Mechanical Engineering, Biochemistry, Molecular Biology or Mechatronics.

The program is directed to bachelor graduates who have equally technical and scientific interest and who want to step up to the plate to deepen their understanding, the production and the instrumental mastery of micro structural elements, microsystems and various nano-objects in research, as well as to bring micro- and nanostructures and functional nanosystems to an industrial application.

The development of materials, structural elements and systems with key components with dimensions under about 0.1 μm has created a significant need for experts that can work at the interface between well-controlled lithographic microtechnology and molecular techniques.

Programme Structure

Courses include:

  • Electronics Technology
  • Semiconductor Devices
  • Materials of Micro- and Nanotechnologies
  • Nanodiagnostics
  • Nanotechnology
  • Project with seminar
  • Master thesis with colloquium

Key information


  • Full-time
    • 24 months

Start dates & application deadlines


120 ECTS


On Campus

Academic requirements

We are not aware of any academic requirements for this programme.

Other requirements

General requirements

For admission to the Master of Science in Micro- and Nanotechnologies (MSc MNT) the successful completion of a Bachelor or comparable course of at least 6 semesters or 180 credit points is required. The MSc MNT builds upon Bachelor degrees in fields of: 

  • Electrical and Communications Engineering
  • Mechanical Engineering
  • Mechatronics
  • Technical Physics
  • Material Science

Tuition Fee

To alway see correct tuition fees
  • International

    Tuition Fee
    Based on the tuition of 0 EUR per year during 24 months.
  • National

    Tuition Fee
    Based on the tuition of 0 EUR per year during 24 months.

There is no tuition, however the semester fee of €134.88 (plus a one-time fee of €15 for the student ID card upon enrollment) must be paid.

Living costs for Ilmenau

630 - 1000 EUR /month
Living costs

The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.


Studyportals Tip: Students can search online for independent or external scholarships that can help fund their studies. Check the scholarships to see whether you are eligible to apply. Many scholarships are either merit-based or needs-based.

Due for update

Updated over a year ago

Check the official programme website for potential updates.

Our partners

Micro and Nanotechnologies
Ilmenau University of Technology


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