Micro and Nanosystems, M.Sc. | ETH Zurich - Swiss Federal Institute of Technology | Zürich, Switzerland
18 months
1390 EUR/year
1390 EUR/year
Tuition fee
Apply date
Start date


The Master program in Micro and Nanosystems at ETH Zurich - Swiss Federal Institute of Technology offers an interdisciplinary education with courses in mechanical and electrical engineering, materials science, as well as physics, chemistry and computational science.


Products and systems are becoming increasingly complex, involving key technologies from multiple engineering disciplines. This joint Master's Program is offered by the Department of Mechanical and Process Engineering (D-​MAVT) in cooperation with the Department of Information Technology and Electrical Engineering (D-​ITET).

The Master’s Program in Micro and Nanosystems offers a future-oriented education to outstanding Bachelor graduates from all over the world. Micro and nanosystems engineers need to master fundamental theoretical knowledge and application-specific aspects of materials and their properties, quantum mechanics, novel properties of devices, system integration, modeling and simulation. Well-established companies, start-ups and emerging industries that utilize technology and system integration require a new generation of engineers who are familiar with a broad range of natural and engineering sciences. These engineers must create and drive innovations for new business opportunities. 

The Master’s Program in Micro and Nanosystems at ETH Zurich - Swiss Federal Institute of Technology provides students with the knowledge and skills needed to meet these challenges. It provides a solid education for the micro and nanosystems engineers of today and tomorrow.

Programme Structure

You will study: 

  • Devices and Systems
  • Energy Conversion and Quantum Phenomena
  • Material Surfaces and Properties
  • Modeling and Simulation

Key information


  • Full-time
    • 18 months

Start dates & application deadlines




On Campus

Academic requirements

We are not aware of any academic requirements for this programme.

Other requirements

General requirements

The Master’s Degree Program in Micro and Nanosystems has a strong interdisciplinary nature and students can apply to the program on the basis of a Bachelor’s Degree in:

  • Mechanical Engineering 
  • Electrical Engineering and Information Technology
  • Microsystems Technology
Candidates for the Master’s Program must present very good performances in fundamental disciplines and competences in technical and natural sciences which must in content, scope, and quality be equivalent to those covered in the ETH Bachelor’s degree programs Mechanical Engineering or Electrical Engineering and Information Technology. These skills are a minimum requirement and serve as a basis for the admission process. 

Tuition Fee

To alway see correct tuition fees
  • International

    1390 EUR/year
    Tuition Fee
    Based on the tuition of 695 EUR per semester during 18 months.
  • National

    1390 EUR/year
    Tuition Fee
    Based on the tuition of 695 EUR per semester during 18 months.
    • tuition fee: CHF 730 per semester

Living costs for Zürich

1920 - 2572 CHF /month
Living costs

The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.


Studyportals Tip: Students can search online for independent or external scholarships that can help fund their studies. Check the scholarships to see whether you are eligible to apply. Many scholarships are either merit-based or needs-based.

Our partners

Micro and Nanosystems
ETH Zurich - Swiss Federal Institute of Technology
Micro and Nanosystems
ETH Zurich - Swiss Federal Institute of Technology


Go to your profile page to get personalised recommendations!