24 months
262 EUR/year
262 EUR/year
Tuition fee
Apply date
Start date


The master program Micro and Nanotechnologies from Ilmenau University of Technology is designed non-consecutive. It is operated as a cooperation by the Department of Electrical Engineering and Information Technology, the Department of Mechanical Engineering and the Department of Mathematics and Natural Sciences. Students can acquire a Master’s degree in Micro- and Nanotechnologies. 


The Micro and Nanotechnologies program from Ilmenau University of Technology is directed to students with a bachelor degree or to those who want to change over from a diploma program (needs to be individually checked) from the following courses: Physics, Technical Physics, Electrical Engineering and Information Technology, Chemistry/Materials Sciences and Engineering, Mechanical Engineering, Biochemistry, Molecular Biology or Mechatronics.


  • Microelectronics
  • Microsystems Technology and Nanotechnology
  • Sensor Technology
  • Measurement Technology
  • Industrial Electronics
  • Power Engineering
  • Information Electronics
  • Medical Technology

Programme Structure

Courses include:

  • Electronics Technology
  • Semiconductor Devices
  • Materials of Micro- and Nanotechnologies
  • Nanodiagnostics
  • Nanotechnology
  • Project with seminar
  • Master thesis with colloquium

Key information


  • Full-time
    • 24 months

Start dates & application deadlines


120 ECTS


On Campus

Academic requirements

We are not aware of any academic requirements for this programme.

Student insurance

Make sure to cover your health, travel, and stay while studying abroad. Even global coverages can miss important items, so make sure your student insurance ticks all the following:

  • Additional medical costs (i.e. dental)
  • Repatriation, if something happens to you or your family
  • Liability
  • Home contents and baggage
  • Accidents
  • Legal aid

We partnered with Aon to provide you with the best affordable student insurance, for a carefree experience away from home.

Get your student insurance now

Starting from €0.53/day, free cancellation any time.

Remember, countries and universities may have specific insurance requirements. To learn more about how student insurance work at Ilmenau University of Technology and/or in Germany, please visit Student Insurance Portal.

Other requirements

General requirements

  • University entrance certificate (secondary level 2 certificate, Abitur, Matura (Higher) Secondary School Certificate...)
  • Listing of all academic achievements at other universities to date
  • Bachelor certificate
  • Certificate of German language skills (at least B2)
  • if you would like to study a Master's degree in English with us: TOEFL or IELTS test result

Tuition Fee

To alway see correct tuition fees
  • International

    262 EUR/year
    Tuition Fee
    Based on the tuition of 131 EUR per semester during 24 months.
  • EU/EEA

    262 EUR/year
    Tuition Fee
    Based on the tuition of 131 EUR per semester during 24 months.

Studying is basically free of charge. However, the semester fee of €131.74 (plus a one-time fee of €15 for the student ID card upon enrollment) must be paid.

Living costs for Ilmenau

630 - 1000 EUR /month
Living costs

The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.


Studyportals Tip: Students can search online for independent or external scholarships that can help fund their studies. Check the scholarships to see whether you are eligible to apply. Many scholarships are either merit-based or needs-based.

Our partners

Micro and Nanotechnologies
Ilmenau University of Technology


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